Alan E. Delahoy

Contact Info

Title: Research Professor
Office: Room 202/204 Microelectronics Center
Hours: Generally 9:00 am - 5.30 pm, M-F
Phone: 973-642-7553
Dept: Physics

Ph.D. in Electrical Engineering, Rutgers University, 1979
B.A. in Physics, University of Oxford, 1971


Alan E. Delahoy is currently a Research Professor in the Department of Physics at NJIT and is also General Manager of the CNBM New Energy Materials Research Center at NJIT.
He received a B.A. in Physics from the University of Oxford and a Ph.D. in Electrical Engineering from Rutgers University.  He has extensive experience in semiconductors, thin-film
technologies, photovoltaics, and PV module manufacturing.   He was previously Vice President, R&D for New Millennium Solar Equipment Corp. and for EPV Solar, Inc., and an Associate
Scientist at Brookhaven National Laboratory.  He has been Principal Investigator on many contracts and awards from NREL, DOE, NSF, NIST, and NJ BPU.  He is the author or co-author of
over 140 technical articles and one book chapter, and holds 13 US patents in the areas of device structures, thin-film deposition, a-Si:H, and Cu(In,Ga)Se2.  He has served on numerous technical committees, and also as a conference organizer and proceedings editor, and as a referee for multiple journals.

He is a member of the American Physical Society, the American Vacuum Society and a Senior Member of the IEEE.




ECE-618 Renewable Energy Systems, Spring 2014, NJIT

ECE-618 Renewable Energy Systems, on-line course development, Summer 2014

ECE-618 Renewable Energy Systems, Fall 2014, Fall 2015, Spring 2017 on-line version

PHYS-121 Electricity and Magnetism, Spring 2016, covered last 5 of 11 Chapters 


His current research interests are in the areas of the deposition and electro-optic properties of thin film materials, their application to photovoltaic devices, and scale up of promising technologies for manufacturing. He is currently working on thin-film materials and devices based on CdTe.  He has built an advanced metal oxide deposition system for research into transparent conducting oxides (TCOs).  He has prepared the entire CdTe solar cell front stack (TCO/HRT/window buffer) by hollow cathode sputtering in this machine. Since completing the machine in mid-2015 he has used it to prepare i-ZnO, ZnO:Al (AZO), ZnOxNy, Zn1-xMgxO, SnO2, ZnxSnyO, CdO, CdO:X, MoO3, NiO, Cu2O, CuOxNy, and CuAlO2. He is studying the influence of band offsets in heterojunction devices, stoichiometry and defects in CdTe, CdTe growth and alloying, transport in electronic materials, and the doping of transparent conducting oxides. He has collaborations with Rutgers University, University of Delaware, National Renewable Energy Laboratory, CTF Solar, Avancis, and CTIEC funding for his research is from China National Building Materials via China Triumph International Engineering Company. 


1.     Y. M. Ding, Z. Cheng, X. Tan, D. Misra, A. E. Delahoy, and K. K. Chin, “Detection of electron emission as DLTS signal in CdTe solar cells,” Journal of Applied Physics, vol. 120, (2016) 135704.
2.     V. Krishnakumar, B. Späth, C. Drost, C. Kraft, B. Siepchen , A. Delahoy, X. Tan, K. Chin, S. Peng, D. Hirsch, O. Zywitzki, T. Modes, and H. Morgner, “Close Spaced Sublimation deposition of CdTe layers with process gas oxygen for thin film solar cells,” Thin Solid Films (2016).
3.     Shou Peng, Xin Cao, Jingong Pan, Xinwei Wang, Xuehai Tan, Alan E. Delahoy, and Ken K. Chin, “X-ray Photoelectron Spectroscopy Study of Indium Tin Oxide Films Deposited at Various Oxygen Partial Pressures,” Journal of Electronic Materials (2016): 1-8.

4.     Ken K. Chin, Zimeng Cheng, Alan E. Delahoy, “Nonstoichiometric Composition Shift in Physical Vapor Deposition of CdTe Thin Films,” Journal of Crystal Growth 418, 32 (2015).
5.     Zimeng Cheng, Alan E. Delahoy, Zhaoqian Su, and Ken K. Chin, “Steady State Minority Carrier Lifetime and Defect Level Occupation in Thin Film CdTe Solar Cells,” Thin Solid Films 558, 391 (2014).
6.     Z. Wang, Z. Cheng, A. E. Delahoy, and K. K. Chin “A Study of Light-Sensitive Ideality Factor and Voltage-Dependent Carrier Collection of CdTe Solar Cells in Forward Bias,” IEEE Journal of Photovoltaics, 3, 843-856 (2013).

7.     J.A. Anna Selvan, A.E. Delahoy, S. Guo, Y-M Li “A New Light Trapping TCO for nc-Si:H Solar Cells” Sol. Energy Mater. Sol. Cells, 90, 3371 (2006).
8.     S.Y. Guo, W.N. Shafarman, A.E. Delahoy “TiN and TiO2:Nb Thin Film Preparation using Hollow Cathode Sputtering with Application to Solar Cells” J. Vac. Sci. Technol. A 24, 1524 (2006).
9.     I.L. Repins, B.J. Stanbery, D.L. Young, S.S. Li, W.K. Metzger, C.L. Perkins, W.N. Shafarman, M.E. Beck, L. Chen, V.K. Kapur, D. Tarrant, M.D. Gonzalez, D.G. Jensen, T.J. Anderson, X. Wang, L.L. Kerr, B. Keyes, S. Asher, A. Delahoy, B. Von Roedern “Comparison of Device Performance and                Measured Transport Parameters in Widely-Varying Cu(In,Ga)(Se,S) Solar Cells” Prog. Photovolt: Res. Appl.14, 25-43 (2006).

10.   A. E. Delahoy and S. Y. Guo “Transparent and Semi-Transparent Conducting Film Deposition by Reactive-Environment, Hollow Cathode Sputtering” J. Vac. Sci. Technol. A 23, 1215 (2005).
11.   Alan E. Delahoy, Liangfan Chen, Masud Akhtar, Baosheng Sang, Sheyu Guo “New Technologies for CIGS Photovoltaics” Solar Energy 77, 785-793 (2004).
12.   A.E. Delahoy, S.Y. Guo, C. Paduraru, and A. Belkind “Reactive-environment, hollow cathode sputtering: basic characteristics and application to Al2O3, doped ZnO, and In2O3:Mo” J. Vac. Sci. Technol. A 22(4), 1697 (2004). 

13.   K. Jansen and A. Delahoy “A laboratory technique for the evaluation of electrochemical transparent conductive oxide delamination from glass substrates”, Thin Solid Films, vol. 423/2, pp 153 – 160 (2003).
14.   Delahoy, A.E., Ruppert, A.F., and Contreras, M. “Charging and Discharging of Defect States in CIGS/ZnO Junctions,” Thin Solid Films 361-362, 140-144 (2000).
15.   J.R. Tuttle, J.R. Sites, A. Delahoy, W. Shafarman, B. Basol, S. Fonash, J. Gray, R. Menner, J. Phillips, A. Rockett, J. Scofield, F. Shapiro, P. Singh, V.Suntharalingam, D. Tarrant, T. Walter, S. Wiedeman, T.M. Peterson, "Characterization and Modeling of Cu(In,Ga)(S,Se)2 - Based Photovoltaic                    Devices: A Laboratory and Industrial Perspective" Progress in Photovoltaics 3, 89-104 (1995).

16.   J.Z. Liu, A. Maruyama, S. Wagner, and A.E. Delahoy, "The Steady State Hole Mobility-Lifetime Product in Undoped a-Si:H" J. Non-cryst. Solids 114, 363 (1989).
17.   A.E. Delahoy, "Recent Developments in Amorphous Silicon Photovoltaic Research and Manufacturing    at Chronar Corporation" Solar Cells 27, 39 (1989).
18.   J. Kalina, H. Schade, and A.E. Delahoy, "Correlation between Fill Factors of Amorphous Silicon Solar Cells and their I-layer Densities of States as Determined by DLTS" Solar Cells 27, 341 (1989).

19.   R.G. Gordon, J. Proscia, F.B. Ellis, Jr., and A.E. Delahoy, "Textured Tin Oxide Films Produced by Atmospheric Pressure Chemical Vapor Deposition from Tetramethyltin and their Usefulness in Producing Light Trapping in Thin Film Amorphous Silicon Solar Cells" Solar Energy Materials 18, 263                     (1989).
20.   I. Balberg, A.E. Delahoy, and H.A. Weakliem, "Ambipolar Diffusion Length Measurements on Hydrogenated Amorphous Silicon p-i-n Structures" Appl. Phys. Lett. 53, 1949 (1988).
21.   I. Balberg, A.E. Delahoy, and H.A. Weakliem, "Self-Consistency and Self-Sufficiency of the Photocarrier Grating Technique" Appl. Phys. Lett. 53, 992 (1988).

22.   A.E. Delahoy, "High Efficiency Amorphous Alloy Solar Cells Prepared by Mercury-Sensitized Photochemical Vapor Deposition of Disilane" Solar Cells, 21, No. 1-4, 153 (1987).
23.   M. Bohm, E. Urbanski, A.E. Delahoy, and Z. Kiss, "Screen-Printed Particulate Silicon Devices for Photovoltaic Applications" Solar Cells, 20, 155 (1987).
24.   F.B. Ellis, Jr., and A.E. Delahoy, "Optical Properties of Hydrogenated Amorphous Silicon Based Solar Cells" Solar Energy Materials, 13, 109 (1986).

25.   A.E. Delahoy, "High Rate Photochemical Deposition of Amorphous Silicon from Higher Silanes" J. Non-crystalline Solids 77 & 78, 833 (1985).
26.   A.J. Appleby, A.E. Delahoy, S.C. Gau, O.J. Murphy, M. Kapur, and J.O.M. Bockris, "An Amorphous Silicon-Based One-Unit Photovoltaic Electrolyzer" Energy, 10, No. 7 pp. 871-876 (1985).
27.   A.E. Delahoy, S.C. Gau, O.J. Murphy, M. Kapur, and J.O.M. Bockris, "A One-Unit Photovoltaic Electrolysis System Based on a Triple Stack of Amorphous Silicon (pin) Cells" Int. J. Hydrogen Energy 10, 113 (1985).

28.   S.C. Gau, H. Volltrauer, F. Faras, A.E. Delahoy, E. Eser, and Z. Kiss, "Manufacturing Process for Interconnected Submodules of Hydrogenated Amorphous Silicon Photovoltaic Panels" Appl. Phys. Lett. 47(12), 1317 (1985).
29.   F.B. Ellis, Jr., and A.E. Delahoy, "Chemical Vapor Deposition of Boron-doped Hydrogenated Amorphous Silicon" Appl. Phys. Lett. 47(2), 135 (1985).
30.   A.E. Delahoy, R.W. Griffith, F.J. Kampas, and P.E. Vanier, "Effects of Monochlorosilane on the Properties of Plasma-Deposited Hydrogenated Amorphous Silicon" J. Electron. Mat. 11, 869 (1982).

31.   T. Skotheim, I. Lundstrom, A.E. Delahoy, F.J. Kampas, and P.E. Vanier, "A Partially Stabilized Photoelectrochemical Cell Using Hydrogenated Amorphous Silicon Photoanodes Coated with Thin Films of Polypyrrole" Appl. Phys. Lett. 40, 281 (1982).
32.   P.E. Vanier, A.E. Delahoy, and R.W. Griffith, "New Features of the Temperature Dependence of Photoconductivity in Plasma-Deposited a-Si:H Alloys" J. Appl. Phys. 52, 5235 (1981).
33.   A.E. Delahoy and R.W. Griffith, "Impurity Effects in a-Si:H Solar Cells due to Air, Oxygen, Nitrogen, Phosphine, or Monochlorosilane in the Plasma" J. Appl. Phys. 52, 6337 (1981).

34.   W.A. Anderson, K. Rajkanan, A. E. Delahoy, and S. L. Hyland. "Grain boundary effects and conduction mechanism studies in chromium metal-insulator-silicon solar cells on polycrystalline silicon." Solar Cells 1, no. 3 (1980): 305-310.
35.   S.K. Dey, W.A. Anderson, A.E. Delahoy, and C. Cartier, "Spectral Response and Diffusion Length Studies of Amorphous, Polycrystalline, Ribbon, Epitaxial and Single-Crystal Silicon MIS Solar Cells" J. Appl. Phys. 50, 4425 (1979).
36.   S.K. Dey, A.E. Delahoy, and W.A. Anderson, "Heat Transfer and Columnar Growth in Electron-Beam Evaporation of Silicon Films for Solar Cell Applications" J. Vac. Sci. Technol. 15, 1739 (1978).

37.   W.A. Anderson, A.E. Delahoy, J.K. Kim, S.L. Hyland, and S.K. Dey, "High-Efficiency Cr-MIS Solar Cells on Single and Polycrystalline Silicon" Appl. Phys. Lett. 33, 588 (1978).
38.   J.K. Kim, W.A. Anderson, and A.E. Delahoy, "Auger, Ellipsometry, and Environmental Studies of Thin Films Applied to Schottky (MIS) Solar Cells" J. Electron. Mat. 7, 403 (1978).
39.   W.A. Anderson, J.K. Kim, and A.E. Delahoy, "Barrier Height Modification in Silicon Schottky (MIS) Solar Cells" IEEE Trans. Electron Devices ED-24, 453 (1977).

40.   W.A. Anderson, S.M. Vernon, A.E. Delahoy, J.K. Kim, and P. Mathe, "Factors which Maximize the Efficiency of Cr-p-Si Schottky (MIS) Solar Cells" J. Vac. Sci. Technol. 13, 1158 (1976).
41.   W.A. Anderson, A.E. Delahoy, and R.A. Milano, "Thin Metal Films as Applied to Schottky Solar Cells: Optical Studies" Appl. Opt. 15, 1621, (1976).
42.   N. Fuschillo, B. Lalevic, W. Slusark, and A.E. Delahoy, "Optical Properties of Thin Au-Cr Films and Their Application to Solar Energy Conversion" J. Vac. Sci. Technol. 12, 84 (1975).

43.   W.A. Anderson, A.E. Delahoy, and R.A. Milano, "An 8% Efficient Layered Schottky Barrier Solar Cell," J. Appl. Phys. 45, 3913 (1974).
44.   W.A. Anderson and A.E. Delahoy, "Schottky Barrier Diodes for Solar Energy Conversion," Proc. IEEE (Lett.) 60, 1457 (1972).

Book Chapters

A.E. Delahoy and S. Guo, Transparent Conductive Oxides for Photovoltaics, Chapter 17 in Handbook of Photovoltaic Science and Engineering, 2nd Edition, Edited by A. Luque and S. Hegedus, Wiley, Chichester (March 2011), pp. 716-796.